High-speed imaging

Both owned hardware and software design, the world's fastest dual-channel simultaneous imaging of secondary electrons and backscattered electrons: video-level high-resolution imaging (2×100M pixels/sec).It able to take 600 million pixel super HD image (area: 50μm×50μm, resolution: 24K×24K) in 6 seconds. Compared with the traditional scanning electron microscope, its scanning speed is more than an order of magnitude higher.

High-definition video-level camera frame rate (2×200 frames/sec@512×512, or 2×60 frames/sec@1024×1024). Allow observation of the sample dynamic changes in real time.

High-quality imaging

SORRIL^TMUnique immersion electromagnetic composite objective lens system effectively reduces objective lens aberration under low landing energy, and achieves extremely high resolution (1.5nm @ 1 kV 1.0nm @ 5 kV).

The electrostatic scanning deflection system combined with the objective lens system greatly reduces edge distortion of images compared to the magnetic deflection system of the traditional electron microscope. And it can obtain both high resolution and large field of view (pixel size 2nm@Field of view 50um, perfect image with horizontal distortion below 1/1000 and vertical distortion below 1/10000)

With In-Lens SE and BSE semiconductor direct electron detectors, dual-channel simultaneous high-speed imaging, high sensitivity and signal electron collection efficiency, large beam conditions can still obtain excellent image contrast and signal noise ratio even in nano-Ampere (nA) level.

With In-Lens SE and BSE semiconductor direct electron detectors, dual-channel simultaneous high-speed imaging, high sensitivity and signal electron collection efficiency, large beam conditions can still obtain excellent image contrast and signal noise ratio even in nano-Ampere (nA) level.

Cross-scale large-scale imaging

Ultra-high-speed scanning and imaging capabilities integrate with automatic focus tracking system and AI image processing algorithm. Enabled high-resolution automatic uninterrupted matrix scanning of super-large area (150mm*150mm) samples. And automatically stitch to obtain large-scale nano-resolution panoramic map imaging, so that it has the ability of cross-scale information, allow cross-scale material characterization from nanometer level to millimeter level.

Intelligent analysis

Intelligent analysis of big data and massive SEM images to quickly generate data analysis reports;

Intelligent image processing, customized image measurement, statistics, and analysis.

Ease to use

Fully automatic sample loading and navigation, one-key sample touch. The wide-field optical imaging navigation is seamlessly connected with SEM imaging to quickly and accurately locate the designated location.。

7*24 hours fully automated unattended operation capability.